2022 IEEE International Integrated Reliability Workshop (IIRW)

Book title Buchtitel
2022 IEEE International Integrated Reliability Workshop (IIRW)
 
ISBN
978-1-6654-5368-4
 
Publisher Herausgeber
IEEE
 
Place of publishing Erscheinungsort
Piscataway
 
DOI
https://doi.org/10.1109/IIRW56459.2022
 

Publications Publikationen

Results 1-2 of 2 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado Modeling Plasma-Induced Damage During the Dry Etching of SiliconInproceedings Konferenzbeitrag9-Oct-2022
2Filipovic, Lado Reliability of Platinum Microheater Geometries for MEMS-Based Gas SensorsInproceedings Konferenzbeitrag2022