2022 IEEE International Integrated Reliability Workshop (IIRW)

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ISBN

9781665453684

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	Author(s)	Title	Type	Issue Date
1	Reiter, Tobias ; Klemenschits, Xaver ; Filipovic, Lado	Modeling Plasma-Induced Damage During the Dry Etching of Silicon	Inproceedings Konferenzbeitrag	9-Oct-2022
2	Filipovic, Lado	Reliability of Platinum Microheater Geometries for MEMS-Based Gas Sensors	Inproceedings Konferenzbeitrag	2022
3	Stampfer, Paul ; Meinhardt, Gerald ; Grasser, Tibor ; Waltl, Michael	Simulating and Modeling the Influence of Deep Trench Interface Recombination on Si Photodiodes	Inproceedings Konferenzbeitrag	2022