Smart Sensors, Actuators, and MEMS III

Book title Buchtitel

Editor Herausgeber_in

Becker, Thomas
Cané, Carles
Barker, N. Scott

Publisher Herausgeber

SPIE

Volume Band

6589

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		Preview	Author(s)	Title	Type	Issue Date
	1		Cervenka, Johann ; Ceric, Hajdin ; Selberherr, Siegfried	Three-Dimensional Simulation of Sacrificial Etching	Konferenzbeitrag Inproceedings	2007