Record link: 
http://hdl.handle.net/20.500.12708/171438
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Title: 
Three-Dimensional Simulation of Sacrificial Etching
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Citation: 
Cervenka, J., Ceric, H., & Selberherr, S. (2007). Three-Dimensional Simulation of Sacrificial Etching. In T. Becker, C. Cané, & N. S. Barker (Eds.), Smart Sensors, Actuators, and MEMS III (pp. 452–460). SPIE. https://doi.org/10.1117/12.721979
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Publisher DOI: 
10.1117/12.721979
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Publication Type: 
Inproceedings - Full-Paper Contribution
en
Authors: 
Cervenka, Johann 
Ceric, Hajdin 
Selberherr, Siegfried 
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Organisational Unit: 
E360 - Institut für Mikroelektronik 
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Published in: 
Smart Sensors, Actuators, and MEMS III 
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Volume: 
6589
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Date (published): 
2007
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Event name: 
International Symposium on Microtechnologies for the New Millennium 
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Event date: 
2-May-2007 - 4-May-2007
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Event place: 
Gran Canaria, Spain, EU
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Number of Pages: 
9
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Publisher: 
SPIE
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Research Areas: 
Modelling and Simulation: 50%
Computational Materials Science: 50%
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Science Branch: 
Elektrotechnik, Elektronik, Informationstechnik
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Appears in Collections:
Conference Paper

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