nanoFIS 2016 - 2nd International Conference on Functional integrated nano Systems

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		Preview	Author(s)	Title	Type	Issue Date
	1		Leitgeb, Markus ; Zellner, Christopher ; Schneider, Michael ; Schmid, Ulrich	Metal assisted Chemical Etching of Monocystalline Silicon Carbide	Konferenzbeitrag Inproceedings	2016
	2		Mayrhofer, Patrick ; Rehlendt, Christopher ; Bittner, Achim ; Schneider, Michael ; Schmid, Ulrich	Scandium Aluminium Nitride for MEMS Applications	Konferenzbeitrag Inproceedings	2016