2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

Event name
2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
 
Event type
Event for scientific audience
 
Start date
27-09-2023
End date
29-09-2023
 
Location
Kobe
Country
Japan
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-3 of 3 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Wilhelmer, Christoph ; Waldhör, Dominic ; Milardovich, Diego ; Cvitkovich, Lukas ; Waltl, Michael ; Grasser, Tibor Intrinsic Electron Trapping in Amorphous Silicon Nitride (a-Si3N4:H)Inproceedings Konferenzbeitrag20-Nov-2023
2Reiter, Tobias ; Toifl, Alexander ; Hössinger, Andreas ; Filipovic, Lado Modeling Oxide Regrowth During Selective Etching in Vertical 3D NAND StructuresInproceedings Konferenzbeitrag20-Nov-2023
3Leroch, Sabine ; Stella, Robert ; Hössinger, Andreas ; Filipovic, Lado Molecular Dynamics Study of Al Implantation in 4H-SiCInproceedings Konferenzbeitrag20-Nov-2023