4th Workshop Ellipsometry
Event name
4th Workshop Ellipsometry
Start date
20-02-2006
Location
Berlin/D
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Laimer, Johann ; Forsich, Christian ; Humlicek, J. ; Störi, Herbert | Closed Loop Control of a Plasma Nitriding Process by Spectroscopic Ellipsometry | Konferenzbeitrag Inproceedings | 2006 |