224th ECS Meeting
Event name
224th ECS Meeting
Start date
27-10-2013
End date
01-11-2013
Location
San Francisco, USA
Country
Event format Veranstaltungsformat
On Site
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Okorn-Schmidt, Harald F. ; Holsteyns, Frank ; Lippert, Alexander ; Mui, David ; Kawaguchi, Mark ; Lechner, Christiane ; Frommhold, Philipp E. ; Nowak, Till ; Mettin, Robert | (Invited) Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements | Konferenzbeitrag Inproceedings | 2013 |