International Conference on Micro- and Nano-Engineering

Event name
International Conference on Micro- and Nano-Engineering
 
Event type
Event for scientific audience
 
Start date
19-09-2005
End date
22-09-2005
 
Location
Wien, Österreich
Country
Austria
 
Event format Veranstaltungsformat
On Site

Publications Publikationen



Filter:
Author:  Bertagnolli, Emmerich
Author:  Abermann, Stephan
Author:  Harasek, Michael

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PreviewAuthor(s)TitleTypeIssue Date
1Abermann, Stephan ; Jordan, Christian ; Harasek, Michael ; Bertagnolli, Emmerich Processing and simulation of few nm thick high-k dielectric filmsPräsentation Presentation2005