International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN)

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Description

Event name
International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN)
 
Event type
Event for scientific audience
 
Start date
27-05-2008
End date
30-05-2008
 
Location
Portland, USA
Country
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Filter:
Author:  Wanzenböck, Heinz D.
Author:  Rödiger, Peter

Results 1-11 of 11 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Wanzenböck, Heinz D. ; Rödiger, Peter ; Hörtlackner, Michael ; Bertagnolli, Emmerich Analysis and evaluation process for quantification of residual gas deposition by a focused electron beamPräsentation Presentation2009
2Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Electron beam induced etching of silicon using chlorine gasPräsentation Presentation2010
3Wanzenböck, Heinz D. ; Ismail, Bassem ; Rödiger, Peter ; Greil, Johannes Maximilian ; Hetzel, Martin ; Lugstein, Alois ; Bertagnolli, Emmerich Engineering electrical properties of Silicon nanowires by focused electron beam induced processing with ChlorinePräsentation Presentation2012
4Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Etching of Germanium by Chlorine Gas using a Focused Electron BeamPräsentation Presentation2011
5Hochleitner, Gottfried ; Hörtlackner, Michael ; Rödiger, Peter ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Experimental evaluation of gas-flux distribution with gas injection systems for focused beam induced depositionKonferenzbeitrag Inproceedings2010
6Wanzenböck, Heinz D. ; Rödiger, Peter ; Waid, Simon ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Focused Beam Induced Etching - Making the Right Choice Between Ions and ElectronsPräsentation Presentation2011
7Wanzenböck, Heinz D. ; Shawrav, Mostafa Moonir ; Mika, Johann ; Waid, Simon ; Gökdeniz, Z.G. ; Rödiger, Peter ; Bertagnolli, Emmerich Focused Electron Beam Induced Etching - Advantages, Features & Limitations of FEBIE with ChlorineKonferenzbeitrag Inproceedings2015
8Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Lugstein, Alois ; Bertagnolli, Emmerich Local, Direct-Write, Damage-Free Thinning of Germanium NanowiresPräsentation Presentation2011
9Hochleitner, Gottfried ; Lugstein, Alois ; Rödiger, Peter ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Nanowire Synthesis on catalyst arrays produced with electron beam induced depositionKonferenzbeitrag Inproceedings2010
10Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Waid, Simon ; Bertagnolli, Emmerich Removal of FIB-Induced Amorphization and Gallium Contamination by Focused-Electron-Beam-Induced-EtchingPräsentation Presentation2011
11Hochleitner, Gottfried ; Hörtlackner, Michael ; Rödiger, Peter ; Wanzenböck, Heinz D. ; Bertagnolli, Emmerich Thermally assisted focused electron beam induced depositionKonferenzbeitrag Inproceedings2010