3rd workshop on focused electron beam induced processing (FEBIP)
Event name
3rd workshop on focused electron beam induced processing (FEBIP)
Event type
Event for scientific audience
Start date
15-07-2010
End date
16-07-2010
Location
Albany, USA
Country
Event format Veranstaltungsformat
On Site
Results 1-2 of 2 (Search time: 0.002 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich | Etching of Silicon by Chlorine Gas using a Focused Electron Beam | Präsentation Presentation | 2010 | |
| 2 | Rödiger, Peter ; Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich | New Approach for Cleaning a SEM Chamber from Hydrocarbon Contamination | Präsentation Presentation | 2010 |