Baltic ALD 2010 & GerALD2

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Description

Event name
Baltic ALD 2010 & GerALD2
 
Event type
Event for scientific audience
 
Start date
16-09-2010
End date
17-09-2010
 
Location
Hamburg,Deutschland
Country
Europe
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-2 of 2 (Search time: 0.001 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Bethge, Ole ; Abermann, Stephan ; Henkel, Christoph ; Straif, C ; Hutter, H. ; Smoliner, Jürgen ; Bertagnolli, Emmerich ALD of high-k oxides on (100) Ge-substrates: Scaling ability and interface engineering for MOS-device applicationsPräsentation Presentation2010
2Henkel, Christoph ; Bethge, Ole ; Abermann, Stephan ; Puchner, S. ; Hutter, H. ; Reiche, Manfred ; Bertagnolli, Emmerich Atomic Layer Deposition of high-k dielectrics on GOI SubstratesPräsentation Presentation2010