2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Event name
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
 
Event type
Event for scientific audience
 
Start date
15-01-2023
End date
19-01-2023
 
Location
Munich
Country
Germany
 
Conference Track
Single Track
Organizing institution Veranstaltende Institution
IEEE
Event format Veranstaltungsformat
Hybrid

Publications Publikationen

Results 1-5 of 5 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Platz, Daniel ; Fabian, Johannes ; Samm, Elisabeth ; Mortada, Mahdi ; Schneider, Michael ; Schmid, Ulrich Exploiting Parametric Instability in Bistable MEMS ActuatorsInproceedings Konferenzbeitrag Jan-2023
2Macho, Matthias ; Yoo, Han Woong ; Schroedter, Richard ; Schitter, Georg Iterative Learning Control for Quasi-Static MEMS Mirror with Switching OperationInproceedings Konferenzbeitrag 15-Jan-2023
3Gesing, Andre L. ; Tran, Thomas ; Platz, Daniel ; Schmid, Ulrich Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and LiquidsInproceedings Konferenzbeitrag 2023
4Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMSInproceedings Konferenzbeitrag Jan-2023
5Schneider, Michael ; Kößl, Bernhard ; Alasatri, Suresh ; Magnet, Ingrid Anna Maria ; Schmid, Ulrich Scalable Modular Measurement System For Continuous Blood Monitoring With Piezoelectric Mems ResonatorsInproceedings Konferenzbeitrag Jan-2023