Platz, D., Fabian, J., Samm, E., Mortada, M., Schneider, M., & Schmid, U. (2023). Exploiting Parametric Instability in Bistable MEMS Actuators. In 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 530–533). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052469
Parametric instability in elastic structures is mostly considered as danger to the structures' integrity. In this paper, we show how parametric instability can be exploited to implement buckled bistable MEMS actuators which reach exceptionally large actuation potentials. We introduce a model for efficiently simulating snap-through dynamics between different buckling states in bistable MEMS. Simulations of the snap-through initiation time in piezoelectrically excited devices show instability regions which are typical for parametric instability. Regions of parametric instability are also found in experiments with bistable MEMS proving that parametric excitation can be exploited for implementing novel bistable MEMS actuators.
