Journal of Micromechanics and Microengineering

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Journal description

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

Results 21-30 of 30 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
21Patocka F - 2019 - Position-dependent mass responsivity of silicon MEMS...pdf.jpgPatocka, F. ; Schneider, M. ; Dörr, N. ; Schneidhofer, C. ; Schmid, U. Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped modeArticle Artikel 2019
22Kucera, M ; Manzaneque, T ; Sánchez-Rojas, J L ; Bittner, A ; Schmid, U Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loopArtikel Article2013
23Manzaneque, T ; Hernando-García, J ; Ababneh, A ; Schwarz, P ; Seidel, H ; Schmid, U ; Sánchez-Rojas, J L Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loopArtikel Article2011
24Kim, Heung-Bae ; Hobler, Gerhard ; Lugstein, Alois ; Bertagnolli, Emmerich Simulation of ion beam induced micro/nano fabricationArtikel Article 2007
25Pfusterschmied, G ; Weinmann, C ; Schneider, M ; Platz, D ; Shen, Naijian ; Sader, J ; Schmid, U Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquidsArtikel Article 2020
26Suter, M. ; Ergeneman, O. ; Zuercher, J. ; Schmid, Silvan ; Camenzind, A. ; Nelson, B.J. ; Hierold, C. Superparamagnetic photocurable nanocomposite for the fabrication of microcantileversArtikel Article2011
27Dorfmeister Manuel - 2019 - Switching performance of bistable membranes...pdf.jpgDorfmeister, Manuel ; Kössl, Bernhard ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Switching performance of bistable membranes activated with integrated piezoelectric thin film transducersArticle Artikel Oct-2019
28Dabsch Alexander - 2018 - Temperature dependency of silicon structures for...pdf.jpgDabsch, Alexander ; Rosenberg, Christoph ; Stifter, Michael ; Keplinger, Franz Temperature dependency of silicon structures for magnetic field gradient sensingArticle Artikel Feb-2018
29Pfusterschmied, G ; Kucera, M ; Wistrela, E ; Manzaneque, T ; Ruiz-Díez, V ; Sánchez-Rojas, J L ; Bittner, A ; Schmid, U Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquidsArtikel Article2015
30Platz, Daniel ; Schmid, Ulrich Vibrational Modes in MEMS ResonatorsArtikel Article 2019