JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Title Titel

e-ISSN

2166-2754

ISSN

2166-2746

Publisher Herausgeber

A V S AMER INST PHYSICS

Publisher's Address Herausgeber Adresse

STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502

Listed in SCI Aufgelistet im SCI

Peer reviewed Begutachtet

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Subject: Process Chemistry and Technology

Date Issued: [2010 TO 2019]

Date Issued: 2017

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		Preview	Author(s)	Title	Type	Issue Date
	1		Detz, Hermann ; Kriz, Martin ; Lancaster, Suzanne ; MacFarland, Donald ; Schinnerl, Markus ; Zederbauer, Tobias ; Andrews, Aaron Maxwell ; Schrenk, Werner ; Strasser, Gottfried	Lithography-free positioned GaAs nanowire growth with focused ion beam implantation of Ga	Artikel Article	2017
	2		Kaczer, B. ; Franco, J. ; Tyaginov, S. ; Jech, M. ; Rzepa, G. ; Grasser, T. ; O'Sullivan, B. J. ; Ritzenhaler, R. ; Schram, T. ; Spessot, A. ; Linten, D. ; Horiguchi, N.	Mapping of CMOS FET Degradation in Bias Space--Application to Dram Peripheral Devices	Artikel Article	2017