Materials Science in Semiconductor Processing

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Journal description

Title Titel
Materials Science in Semiconductor Processing
 
e-ISSN
1873-4081
 
ISSN
1369-8001
 
Publisher Herausgeber
ELSEVIER SCI LTD
 
Publisher's Address Herausgeber Adresse
125 London Wall, London, England, EC2Y 5AS
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Author:  Bertagnolli, E.
Author:  Shawrav, M.M.

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PreviewAuthor(s)TitleTypeIssue Date
1Shawrav, M.M. ; Gökdeniz, Z.G. ; Wanzenboeck, H.D. ; Taus, P. ; Mika, J.K. ; Waid, S. ; Bertagnolli, E. Chlorine based focused electron beam induced etching: A novel way to pattern germaniumArtikel Article 2016