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| | Preview | Author(s) | Title | Type | Issue Date |
| 1 | | Manzaneque, Tomás ; Hernando, J. ; Rodríguez-Aragón, L. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. | Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid | Artikel Article | 2010 |
| 2 | | Toledo, J. ; Ruiz-Díez, V. ; Pfusterschmied, G. ; Schmid, U. ; Sánchez-Rojas, J. L. | Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids | Artikel Article  | 2018 |
| 3 | | Hernando, Jorge ; Sánchez-Rojas, Jose Luis ; Schmid, Ulrich ; Ababneh, Abdallah ; Marchand, Günter ; Seidel, Helmut | Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators | Artikel Article | 2010 |
| 4 | | Schmid, U. ; Ababneh, A. ; Seidel, H. ; Wagner, R. ; Bauer, K. | Characterization of Aluminium Nitride and Aluminium Oxide Thin Films Sputter-Deposited On Organic Substrates | Artikel Article | 2008 |
| 5 | | Deutschinger, A. ; Schmid, U. ; Schneider, M. ; Brenner, W. ; Wanzenböck, H. ; Volland, B. ; Ivanov, Tzv. ; Rangelow, I. W. | Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique | Artikel Article | 2010 |
| 6 | | Ruiz, David ; Donoso, Alberto ; Bellido, José Carlos ; Kucera, Martin ; Schmid, Ulrich ; Sánchez-Rojas, José Luis | Design of piezoelectric microtransducers based on the topology optimization method | Artikel Article | 2016 |
| 7 | | Alamin Dow, Ali B. ; Bittner, Achim ; Schmid, Ulrich ; Kherani, Nazir P. | Design, fabrication and testing of a piezoelectric energy microgenerator | Artikel Article | 2014 |
| 8 | | Becker, Thomas ; Schmid, Ulrich ; Michel, Bernd | Editorial - Special Issue of the Conference 'Smart Sensors, Actuators and MEMS', within the SPIE Europe Symposium 'Microtechnologies for the New Millennium' Dresden, Germany, 4-6 May 2009 | Artikel Article | 2010 |
| 9 | | Ababneh, Abdallah ; Al-Omari, A. N. ; Dagamseh, A. M. K. ; Qiu, H. C. ; Feili, D. ; Ruiz-Díez, V. ; Manzaneque, T. ; Hernando, J. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. ; Seidel, H. | Electrical characterization of micromachined AlN resonators at various back pressures | Artikel Article | 2014 |
| 10 | | Thangaraj, K. ; Elefsiniots, A. ; Becker, Thomas ; Schmid, Ulrich ; Lees, J. ; Featherston, C. A. ; Pullin, R. | Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester | Artikel Article | 2014 |
| 11 | | Ababneh, A. ; Kreher, H. ; Schmid, U. | Etching Behaviour of Sputter-Deposited Aluminium Nitride Thin Films in H3P04 and KOH Solutions | Artikel Article | 2008 |
| 12 | | Schmid, U. ; Schmitt-Landsiedel, D. ; Krötz, G. | Evaluation of Electron Beam Welding Technique for the Integration of Robust Sensor Elements into High-Pressure Automotive Systems | Artikel Article | 2008 |
| 13 | | Wistrela, E. ; Schneider, M. ; Bittner, A. ; Schmid, U. | Impact of the substrate dependent polarity distribution in c‑axis oriented AlN thin films on the etching behaviour and the piezoelectric properties | Artikel Article | 2016 |
| 14 | | Kucera, M. ; Hofbauer, F. ; Wistrela, E. ; Manzaneque, T. ; Ruiz-Díez, V. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. | Lock‑in amplifier powered analogue Q‑control circuit for self‑actuated self‑sensing piezoelectric MEMS resonators | Artikel Article | 2014 |
| 15 | | Bittner, A. ; Pagel, N. ; Seidel, H. ; Schmid, U. | Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates | Artikel Article | 2012 |
| 16 | | Iannacci, J. ; Serra, E. ; Sordo, G. ; Bonaldi, M. ; Borrielli, A. ; Schmid, U. ; Bittner, A. ; Schneider, M. ; Kuenzig, T. ; Schrag, G. ; Pandraud, G. ; Sarro, P. M. | MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensing | Artikel Article | 2018 |
| 17 | | Alamin Dow, Ali B. ; Schneider, M. ; Koo, David ; Al-Rubaye, Hasan A. ; Bittner, A. ; Schmid, U. ; Kherani, Nazir | Modeling the performance of a micromachined piezoelectric energy harvester | Artikel Article | 2012 |
| 18 | | Ruiz, V. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. | Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode | Artikel Article | 2012 |
| 19 | | Sordo, G. ; Serra, E. ; Schmid, U. ; Iannacci, J. | Optimization method for designing multimodal piezoelectric MEMS energy harvesters | Artikel Article | 2016 |
| 20 | | Kulygin, A. ; Gergen, M. ; Schmid, U. ; Seidel, H. | Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical Approach | Artikel Article | 2008 |
