MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

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Journal description

Title Titel
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 
e-ISSN
1432-1858
 
ISSN
0946-7076
 
Publisher Herausgeber
SPRINGER HEIDELBERG
 
Publisher's Address Herausgeber Adresse
TIERGARTENSTRASSE 17, HEIDELBERG, GERMANY, D-69121
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

Results 41-47 of 47 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
41Schmid, Ulrich ; Becker, Thomas ; Michel, Bernd Special issue of the conference 'Smart Sensors, Actuators andMEMS', within the SPIE EUROPE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011Artikel Article2012
42Grosser, Michaela ; Münch, M. ; Brenner, J. ; Wilke, M. ; Seidel, H. ; Bienert, C. ; Roosen, A. ; Schmid, U. Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputteringArtikel Article 2010
43Schneider, Michael ; Bittner, Achim ; Schmid, Ulrich Temperature dependant dielectric breakdown of sputter‑deposited AlN thin films using a time‑zero approachArtikel Article2014
44Iannacci, J. ; Sordo, G. ; Serra, E. ; Schmid, U. The MEMS four‑leaf clover wideband vibration energy harvesting device: design concept and experimental verificationArtikel Article 2016
45Steiner, H. ; Hortschitz, W. ; Stifter, M. ; Keplinger, F. ; Sauter, T. Thermal actuators featuring large displacements for passive temperature sensingArtikel Article 2013
46Cervenka, Johann ; Ceric, Hajdin ; Selberherr, Siegfried Three-Dimensional Simulation of Sacrificial EtchingArtikel Article2008
47Alamin Dow, Ali B. ; Schmid, Ulrich ; Kherani, Nazir P. Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling studyArtikel Article2014