Thin Solid Films
Title Titel
Thin Solid Films
e-ISSN
1879-2731
ISSN
0040-6090
Publisher Herausgeber
ELSEVIER SCIENCE SA
Publisher's Address Herausgeber Adresse
PO BOX 564, LAUSANNE, SWITZERLAND, 1001
Listed in SCI Aufgelistet im SCI
Peer reviewed Begutachtet
Subject
- 5 Electronic, Optical and Magnetic Materials
- 5 Materials Chemistry
- 5 Metals and Alloys
- 5 Surfaces and Interfaces
- 1 Hydrogenated amorphous silicon carbide (a-SiC:H) Annealing Mass effusion Fourier transforminfrared spectroscopy (FT-IR) Young's modulus Hardness Residual stress Microstructure
- 1 Hydrogenated amorphous silicon carbide Inductively coupled plasma enhanced chemical vapor deposition Microelectromechanical systems Young's modulus Hardness Mass effusion Surface roughness Fourier transform infrared spectroscopy
- 1 RF reactive sputtering Silicon nitride Residual stress Etching behaviour Leakage current Poole-Frenkel
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