Full name Familienname, Vorname
Seidel, H.
 

Results 1-20 of 24 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Ababneh, Abdallah ; Al-Omari, A. N. ; Dagamseh, A. M. K. ; Qiu, H. C. ; Feili, D. ; Ruiz-Díez, V. ; Manzaneque, T. ; Hernando, J. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. ; Seidel, H. Electrical characterization of micromachined AlN resonators at various back pressuresArtikel Article2014
2Manzaneque, Tomás ; Ruiz-Díez, V. ; Hernando-García, J. ; Ababneh, A. ; Al-Omari, A. N. ; Kucera, M. ; Bittner, A. ; Schmid, U. ; Seidel, H. ; Sánchez-Rojas, J. L. Piezoelectric in‑plane microplate resonators based on contour and flexure‑actuated modesArtikel Article2014
3Oliver, M. J. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Andrés, J. P. ; Pobedinskas, P. ; Haenen, K. ; Sánchez-Rojas, J. L. Resonantly excited AlN-based microcantilevers for immunosensingArtikel Article2012
4Bittner, A. ; Pagel, N. ; Seidel, H. ; Schmid, U. Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substratesArtikel Article2012
5Ruiz, V. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane modeArtikel Article2012
6Fricke, S. ; Friedberger, A. ; Seidel, H. ; Schmid, U. A robust pressure sensor for harsh environmental applicationsArtikel Article2012
7Balck, A. ; Kirsch, C. ; Schmid, U. ; Seidel, H. ; Leester-Schädel, M. ; Büttgenbach, S. Bistable Microvalve for Biomedical UsageBuchbeitrag Book Contribution 2011
8Bolzmacher, C. ; Bauer, K. ; Schmid, U. ; Hafez, M. ; Seidel, H. Displacement amplification of piezoelectric microactuators with a micromachined leverage unitArtikel Article2010
9Bittner, A. ; Seidel, H. ; Schmid, U. Electromigration resistance and long term stability of textured silver thin films on LTCCArtikel Article2010
10Bittner, A. ; Ababneh, A. ; Seidel, H. ; Schmid, U. Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substratesArtikel Article2010
11Manzaneque, Tomás ; Hernando, J. ; Rodríguez-Aragón, L. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. Analysis of the quality factor of AlN-actuated micro-resonators in air and liquidArtikel Article2010
12Ababneh, A. ; Schmid, U. ; Hernando, J. ; Sánchez-Rojas, J.L. ; Seidel, H. The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin filmsArtikel Article2010
13Manzaneque, T. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Sökmen, Ü. ; Peiner, E. ; Schmid, U. ; Sánchez-Rojas, J.L. Quality factor enhancement in AlN-actuated MEMS by velocity feedback loopKonferenzbeitrag Inproceedings2010
14Fricke, S. ; Friedberger, A. ; Seidel, H. ; Schmid, U. Micromachined Pressure Sensor Based on Sapphire for High Temperature ApplicationsKonferenzbeitrag Inproceedings2010
15Grosser, Michaela ; Münch, M. ; Brenner, J. ; Wilke, M. ; Seidel, H. ; Bienert, C. ; Roosen, A. ; Schmid, U. Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputteringArtikel Article 2010
16Stehle, A. ; Georgiev, G. ; Ziegler, V. ; Schoenlinner, B. ; Prechtel, U. ; Schmid, U. ; Seidel, H. Broadband Single-Pole Multithrow RF-MEMS Switches for Ka-BandKonferenzbeitrag Inproceedings2009
17Schmid, U. ; Ababneh, A. ; Seidel, H. ; Wagner, R. ; Bauer, K. Characterization of Aluminium Nitride and Aluminium Oxide Thin Films Sputter-Deposited On Organic SubstratesArtikel Article2008
18Kulygin, A. ; Gergen, M. ; Schmid, U. ; Seidel, H. Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical ApproachArtikel Article2008
19Soldera, F. ; Burdiles, G. ; Schmid, U. ; Seidel, H. ; Mücklich, F. Investigation of the Interaction between Electrical Discharges and Low Resistivity Silicon SubstratesArtikel Article2008
20Schmid, U. ; Seidel, H. Effect of High Temperature Annealing on the Electrical Performance of Titanium/Platinum Thin FilmsArtikel Article2008