| | Preview | Author(s) | Title | Type | Issue Date |
| 1 | | Ababneh, Abdallah ; Al-Omari, A. N. ; Dagamseh, A. M. K. ; Qiu, H. C. ; Feili, D. ; Ruiz-DÃez, V. ; Manzaneque, T. ; Hernando, J. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. ; Seidel, H. | Electrical characterization of micromachined AlN resonators at various back pressures | Artikel Article | 2014 |
| 2 | | Manzaneque, Tomás ; Ruiz-DÃez, V. ; Hernando-GarcÃa, J. ; Ababneh, A. ; Al-Omari, A. N. ; Kucera, M. ; Bittner, A. ; Schmid, U. ; Seidel, H. ; Sánchez-Rojas, J. L. | Piezoelectric in‑plane microplate resonators based on contour and flexure‑actuated modes | Artikel Article | 2014 |
| 3 | | Oliver, M. J. ; Hernando-GarcÃa, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Andrés, J. P. ; Pobedinskas, P. ; Haenen, K. ; Sánchez-Rojas, J. L. | Resonantly excited AlN-based microcantilevers for immunosensing | Artikel Article | 2012 |
| 4 | | Bittner, A. ; Pagel, N. ; Seidel, H. ; Schmid, U. | Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates | Artikel Article | 2012 |
| 5 | | Ruiz, V. ; Hernando-GarcÃa, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. | Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode | Artikel Article | 2012 |
| 6 | | Fricke, S. ; Friedberger, A. ; Seidel, H. ; Schmid, U. | A robust pressure sensor for harsh environmental applications | Artikel Article | 2012 |
| 7 | | Balck, A. ; Kirsch, C. ; Schmid, U. ; Seidel, H. ; Leester-Schädel, M. ; Büttgenbach, S. | Bistable Microvalve for Biomedical Usage | Buchbeitrag Book Contribution ![peer reviewed](/image/PeerReview_Icon.png) | 2011 |
| 8 | | Bolzmacher, C. ; Bauer, K. ; Schmid, U. ; Hafez, M. ; Seidel, H. | Displacement amplification of piezoelectric microactuators with a micromachined leverage unit | Artikel Article | 2010 |
| 9 | | Bittner, A. ; Seidel, H. ; Schmid, U. | Electromigration resistance and long term stability of textured silver thin films on LTCC | Artikel Article | 2010 |
| 10 | | Bittner, A. ; Ababneh, A. ; Seidel, H. ; Schmid, U. | Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates | Artikel Article | 2010 |
| 11 | | Manzaneque, Tomás ; Hernando, J. ; RodrÃguez-Aragón, L. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. | Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid | Artikel Article | 2010 |
| 12 | | Ababneh, A. ; Schmid, U. ; Hernando, J. ; Sánchez-Rojas, J.L. ; Seidel, H. | The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films | Artikel Article | 2010 |
| 13 | | Manzaneque, T. ; Hernando-GarcÃa, J. ; Ababneh, A. ; Seidel, H. ; Sökmen, Ãœ. ; Peiner, E. ; Schmid, U. ; Sánchez-Rojas, J.L. | Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop | Konferenzbeitrag Inproceedings | 2010 |
| 14 | | Fricke, S. ; Friedberger, A. ; Seidel, H. ; Schmid, U. | Micromachined Pressure Sensor Based on Sapphire for High Temperature Applications | Konferenzbeitrag Inproceedings | 2010 |
| 15 | | Grosser, Michaela ; Münch, M. ; Brenner, J. ; Wilke, M. ; Seidel, H. ; Bienert, C. ; Roosen, A. ; Schmid, U. | Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering | Artikel Article ![peer reviewed](/image/PeerReview_Icon.png) | 2010 |
| 16 | | Stehle, A. ; Georgiev, G. ; Ziegler, V. ; Schoenlinner, B. ; Prechtel, U. ; Schmid, U. ; Seidel, H. | Broadband Single-Pole Multithrow RF-MEMS Switches for Ka-Band | Konferenzbeitrag Inproceedings | 2009 |
| 17 | | Schmid, U. ; Ababneh, A. ; Seidel, H. ; Wagner, R. ; Bauer, K. | Characterization of Aluminium Nitride and Aluminium Oxide Thin Films Sputter-Deposited On Organic Substrates | Artikel Article | 2008 |
| 18 | | Kulygin, A. ; Gergen, M. ; Schmid, U. ; Seidel, H. | Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical Approach | Artikel Article | 2008 |
| 19 | | Soldera, F. ; Burdiles, G. ; Schmid, U. ; Seidel, H. ; Mücklich, F. | Investigation of the Interaction between Electrical Discharges and Low Resistivity Silicon Substrates | Artikel Article | 2008 |
| 20 | | Schmid, U. ; Seidel, H. | Effect of High Temperature Annealing on the Electrical Performance of Titanium/Platinum Thin Films | Artikel Article | 2008 |