Record link: 
http://hdl.handle.net/20.500.12708/167585
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Title: 
Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop
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Citation: 
Manzaneque, T., Hernando-García, J., Ababneh, A., Seidel, H., Sökmen, Ü., Peiner, E., Schmid, U., & Sánchez-Rojas, J. L. (2010). Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 1494–1497). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.400
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Publisher DOI: 
10.1016/j.proeng.2010.09.400
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Publication Type: 
Inproceedings - Full-Paper Contribution
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Language: 
English
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Authors: 
Manzaneque, T. 
Hernando-García, J. 
Ababneh, A. 
Seidel, H. 
Sökmen, Ü. 
Peiner, E. 
Schmid, U. 
Sánchez-Rojas, J.L. 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Published in: 
Eurosensor XXIV Conference 
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Date (published): 
2010
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Event name: 
Eurosensors XXIV 
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Event date: 
5-Sep-2010 - 8-Sep-2010
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Event place: 
Linz, Austria
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Number of Pages: 
4
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Publisher: 
Elsevier BV
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Keywords: 
Industrial and Manufacturing Engineering; aluminium nitride; piezoelectric; micromachined resonators; Q factor; velocity feedback
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Abstract: 
This report details electronic feedback techniques which allow precise control of the quality factor Q of a two-port piezoelectric micromechanical resonator device, independent of the ambient operating conditions. A circuit including a microbridge resonator has been implemented to increase the quality factor of the device. Q amplification has been validated by both time domain and frequency spectrum measurements. In addition to electrical measurements, a mechanical characterization of the resonator was carried out by means of a laser vibrometer, which confirmed the increase in Q factor due to the electronic feedback. Enhancement factors of almost two orders of magnitude were achieved, demonstrating an effective way to improve the performance of piezoelectric MEMS by a suitable electronic design.
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Research Areas: 
Materials Characterization: 10%
Special and Engineering Materials: 20%
Structure-Property Relationship: 15%
Sensor Systems: 35%
Sustainable and Low Emission Mobility: 10%
Sustainable Production and Technologies: 10%
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Conference Paper

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