Micromachined Pressure Sensor Based on Sapphire for High Temperature Applications

Abstract

which is targeted for harsh environmental applications. High temperature levels, aggressive media and high pressure loads typically occur in gas turbines, rocket engines or deep drilling systems. For pre-evaluation purposes, a reusable packing is used enabling very effectively device characterization up to temperatures of 300°C and pressures of 100 bar. As expected, the output signals of the Wheatstone bridge increase with higher pressures, but decrease with enhanced temperature levels. These curves show a maximum, negative drift of about -30 ppm at full temperature and pressure load and the sensitivity is about 10 ~V/(V·bar).