Fricke, S., Friedberger, A., Seidel, H., & Schmid, U. (2010). Micromachined Pressure Sensor Based on Sapphire for High Temperature Applications. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 1396–1400). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.376
Industrial and Manufacturing Engineering; platinum; harsh environment; sapphire; thin film metallization; pressure sensor; reusable packaging
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Abstract:
which is targeted for harsh environmental applications. High temperature levels, aggressive media and high pressure loads
typically occur in gas turbines, rocket engines or deep drilling systems. For pre-evaluation purposes, a reusable packing is used
enabling very effectively device characterization up to temperatures of 300°C and pressures of 100 bar. As expected, the output
signals of the Wheatstone bridge increase with higher pressures, but decrease with enhanced temperature levels. These curves
show a maximum, negative drift of about -30 ppm at full temperature and pressure load and the sensitivity is about
10 ~V/(V·bar).
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Research Areas:
Materials Characterization: 10% Special and Engineering Materials: 20% Structure-Property Relationship: 15% Sensor Systems: 35% Sustainable and Low Emission Mobility: 10% Sustainable Production and Technologies: 10%