<div class="csl-bib-body">
<div class="csl-entry">Tolstik, N., Sorokin, E., Mac-Cragh, J. C., Richter, R., & Sorokina, I. T. (2022). Single-pulse Laser Induced Buried Defects in Silicon Written by Ultrashort-pulse Laser at 2.1 um. In <i>Proceedings: Conference on Lasers and Electro-Optics</i>. Conference on Lasers and Electro-Optics (CLEO 2022, San Jose, CA, USA), San Jose, California, United States of America (the). https://doi.org/10.1364/CLEO_AT.2022.AM4I.8</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/139946
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dc.language.iso
en
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dc.subject
Single-pulse
en
dc.subject
Ultrashort-pulse
en
dc.subject
Silicon
en
dc.title
Single-pulse Laser Induced Buried Defects in Silicon Written by Ultrashort-pulse Laser at 2.1 um
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Norwegian University of Science and Technology
-
dc.contributor.affiliation
Norwegian University of Science and Technolog
-
dc.contributor.affiliation
Norwegian University of Science and Technolog
-
dc.contributor.affiliation
Norwegian University of Science and Technology
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dc.type.category
Full-Paper Contribution
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tuw.booktitle
Proceedings: Conference on Lasers and Electro-Optics
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tuw.peerreviewed
true
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tuw.researchTopic.id
Q1
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tuw.researchTopic.name
Photonics
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tuw.researchTopic.value
100
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tuw.publication.orgunit
E387-01 - Forschungsbereich Photonik
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tuw.publisher.doi
10.1364/CLEO_AT.2022.AM4I.8
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dc.description.numberOfPages
2
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tuw.event.name
Conference on Lasers and Electro-Optics (CLEO 2022, San Jose, CA, USA)
en
tuw.event.startdate
15-05-2022
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tuw.event.enddate
20-05-2022
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tuw.event.online
Hybrid
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tuw.event.type
Event for scientific audience
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tuw.event.place
San Jose, California
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tuw.event.country
US
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tuw.event.presenter
Tolstik, N.
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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Inproceedings
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Konferenzbeitrag
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restricted
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Publications
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Publications
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en
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http://purl.org/coar/resource_type/c_18cf
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http://purl.org/coar/resource_type/c_18cf
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no Fulltext
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crisitem.author.dept
E387 - Institut für Photonik
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crisitem.author.dept
E387-01 - Forschungsbereich Photonik
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crisitem.author.dept
Norwegian University of Science and Technolog
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crisitem.author.dept
Norwegian University of Science and Technolog
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crisitem.author.dept
E387 - Institut für Photonik
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E350 - Fakultät für Elektrotechnik und Informationstechnik
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crisitem.author.parentorg
E387 - Institut für Photonik
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
