Gas sensors based on individual indium oxide nanowire

Abstract

Indium oxide nanostructures have been prepared by carbothermal reduction method. From them,nanowires have been structurally and optically characterized using X-ray diffraction, scanning and trans-mission electron microscopy and photoluminescence. The indium oxide nanowires have been removedfrom the substrate and contacted by Focused Electron- and Focused Ion-Beam Induced Deposition tech-niques to interdigitates on suspended microhotplates, which allow heating up to 300◦C with a low powerconsumption of only 8 mW. The gas response of the tested devices towards ethanol, carbon monoxideand nitrogen dioxide diluted in dry synthetic air at different concentrations and temperatures has beencarried out showing a selectivity towards ethanol with responses up to 50% at temperatures between 200and 300◦C, while only small response to high concentrations of carbon monoxide and nitrogen dioxideis observed.