High-entropy alloys (HEAs) and high-entropy metal-sublattice ceramics (HESCs) have recently gained particular attraction in the field of materials research due to their promising properties, such as high hardness, high strength, and thermal stability. Within this work, we report on the phase formation and thermal stability of high entropy metal-sublattice carbides to provide a further insight to a more extensive understanding of the high-entropy effect, according to which, based on the Gibbs-free energy, such materials should be stabilised in the high-temperature regime. Therefore, (Hf,Ta,Ti,V,Zr)C coatings were reactively and non-reactively sputtered from a single powder-metallurgically produced composite target (either metallic or consisting of the respective binary carbides). Reactively sputtered coatings were synthesised using an C2H2 – Ar mixture with different C2H2/(C2H2+Ar) ratios (fC2H2). After deposition, the coatings were investigated in as-deposited state and after vacuum annealing between 800 and 1200°C. The structure and morphology, the chemical composition, the mechanical properties, and the thermal stability of the coatings were investigated by scanning electron microscopy, X-ray diffraction, and nanoindentation. The non-reactively sputtered as well as reactively sputtered coatings with fC2H2= 20 % show a single-phased face-centred cubic (fcc) structure. The hardness for the non-reactively sputtered HESCs is with ~41 GPa higher than that of the reactively sputtered one which exhibits a hardness of 35 GPa. This indicates that due to the use of C2H2 also regions of amorphous carbon form, which slightly weaken the coating already in the as-deposited state. After vacuum annealing up to 1200 °C the non-reactively sputtered coatings maintain a hardness of ~40 GPa indicating retarded softening mechanisms due to sluggish diffusion. Additionally, powdered free-standing coating material was investigated by XRD in as deposited state and after vacuum annealing up to 1300 °C. The results of these investigations show, independent of the synthesis route, no phase transformation within the investigated temperature range. This behaviour was also observed in previous studies on different material classes such as nitrides, borides, and oxides indicating a stabilisation due to the high-entropy metal sublattice.