In this work we introduce a novel sample carrier for liquid AFM that is more chemically resistant, easier to handle and cheaper than the state of the art ZnSe prisms. Our approach uses micro-machined flat silicon-wafer that can be used for AFM-IR experiments. This opens up new ways for measuring AFM-IR in liquids. The flat shape allows easy handling and spin coating of samples on the carrier. Because the carrier is made of silicon, surface functionalization is well understood. Changing a system build around the use of ATR prisms, of course needs some adjustments to the instrumentation. Using rapid prototyping these new, flat Si-carriers can be made compatible with existing commercial AFM-IR instruments. For highest sensitivity, adjustments to the beam path are required to account for this new substrate’s geometry, as there is the change from a high-refractive index prism to a flat ATR holder of different material. This was achieved with an additional, removable collimating lens.