Record link: 
http://hdl.handle.net/20.500.12708/167352
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Title: 
Hybrid Optical MEMS Vibration Sensor
en
Citation: 
Hortschitz, W., Steiner, H., Sachse, M., Kohl, F., Schalko, J., & Keplinger, F. (2010). Hybrid Optical MEMS Vibration Sensor. In B. Jakoby & M. J. Vellekoop (Eds.), Eurosensor XXIV Conference (pp. 420–423). Elsevier BV. https://doi.org/10.1016/j.proeng.2010.09.136
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Publisher DOI: 
10.1016/j.proeng.2010.09.136
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Publication Type: 
Inproceedings - Full-Paper Contribution
en
Language: 
English
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Authors: 
Hortschitz, Wilfried 
Steiner, Harald 
Sachse, Matthias 
Kohl, Franz 
Schalko, Johannes 
Keplinger, Franz 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
E366-50 - Services des Instituts 
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Published in: 
Eurosensor XXIV Conference 
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Date (published): 
2010
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Event name: 
Proc. Eurosensors XXIV 
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Event date: 
5-Sep-2010 - 8-Sep-2010
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Event place: 
Linz, Austria
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Number of Pages: 
4
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Publisher: 
Elsevier BV
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Research Areas: 
Sensor Systems: 50%
Structure-Property Relationship: 25%
Special and Engineering Materials: 20%
Biological and Bioactive Materials: 5%
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Conference Paper

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