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Year of Publication
DC Field
Value
Language
dc.contributor.author
Bammer, Ferdinand
-
dc.date.accessioned
2023-03-07T16:54:39Z
-
dc.date.available
2023-03-07T16:54:39Z
-
dc.date.issued
2022
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Bammer, F. (2022). <i>2D-Inline-Thickness Monitoring with Imaging-Ellipsometry</i> [Presentation]. 2D-Inline-Thickness Monitoring with Imaging-Ellispometry, Austria.</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/168396
-
dc.language.iso
en
-
dc.subject
Ellipsometrie
en
dc.title
2D-Inline-Thickness Monitoring with Imaging-Ellipsometry
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Presentation
-
tuw.researchTopic.id
Q1
-
tuw.researchTopic.name
Photonics
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E311-02-2 - Forschungsgruppe Prozesstechnik
-
tuw.event.name
2D-Inline-Thickness Monitoring with Imaging-Ellispometry
en
tuw.event.startdate
12-04-2022
-
tuw.event.enddate
12-04-2022
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.country
AT
-
tuw.event.presenter
Bammer, Ferdinand
-
wb.sciencebranch
Maschinenbau
-
wb.sciencebranch
Werkstofftechnik
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2030
-
wb.sciencebranch.oefos
2050
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
70
-
wb.sciencebranch.value
15
-
wb.sciencebranch.value
15
-
item.openairetype
Presentation
-
item.openairetype
Vortrag
-
item.grantfulltext
none
-
item.cerifentitytype
Publications
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cf
-
item.fulltext
no Fulltext
-
crisitem.author.dept
E311-02-2 - Forschungsgruppe Prozesstechnik
-
crisitem.author.parentorg
E311-02 - Forschungsbereich Photonische Technologien
-
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