Record link: 
http://hdl.handle.net/20.500.12708/168396
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Title: 
2D-Inline-Thickness Monitoring with Imaging-Ellipsometry
en
Citation: 
Bammer, F. (2022). 2D-Inline-Thickness Monitoring with Imaging-Ellipsometry [Presentation]. 2D-Inline-Thickness Monitoring with Imaging-Ellispometry, Austria.
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Publication Type: 
Presentation - Presentation
en
 
Vortrag - Presentation
de
Language: 
English
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Authors: 
Bammer, Ferdinand 
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Organisational Unit: 
E311-02-2 - Forschungsgruppe Prozesstechnik 
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Date (published): 
2022
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Event name: 
2D-Inline-Thickness Monitoring with Imaging-Ellispometry 
en
Event date: 
12-Apr-2022
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Event place: 
Austria
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Keywords: 
Ellipsometrie
en
Research Areas: 
Photonics: 100%
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Science Branch: 
2030 - Maschinenbau: 70%
2050 - Werkstofftechnik: 15%
2020 - Elektrotechnik, Elektronik, Informationstechnik: 15%
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