DC Field
Value
Language
dc.contributor.author
Miano, Daniela
-
dc.date.accessioned
2023-05-05T09:40:45Z
-
dc.date.available
2023-05-05T09:40:45Z
-
dc.date.issued
2023-05
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Miano, D. (2023, May). <i>Understanding interaction forces at silicon wafer interfaces to optimize nanoscale cleaning processes (poster)</i> [Conference Presentation]. 2nd Conference of Applied Surface Technology (COAST 2023), Wien, TU, Austria. http://hdl.handle.net/20.500.12708/176842</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/176842
-
dc.language.iso
en
-
dc.subject
Angewandte Grenzflächenphysik
de
dc.title
Understanding interaction forces at silicon wafer interfaces to optimize nanoscale cleaning processes (poster)
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Conference Presentation
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Surfaces and Interfaces
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.linking
coast.cest.at
-
tuw.publication.orgunit
E134-02 - Forschungsbereich Applied Interface Physics
-
tuw.event.name
2nd Conference of Applied Surface Technology (COAST 2023)
en
tuw.event.startdate
02-05-2023
-
tuw.event.enddate
03-05-2023
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Wien, TU
-
tuw.event.country
AT
-
tuw.event.presenter
Miano, Daniela
-
wb.sciencebranch
Physik, Astronomie
-
wb.sciencebranch.oefos
1030
-
wb.sciencebranch.value
100
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cp
-
item.grantfulltext
restricted
-
item.languageiso639-1
en
-
item.cerifentitytype
Publications
-
item.fulltext
no Fulltext
-
item.openairetype
conference paper not in proceedings
-
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