Record link: 
http://hdl.handle.net/20.500.12708/176842
-
Title: 
Understanding interaction forces at silicon wafer interfaces to optimize nanoscale cleaning processes (poster)
en
Citation: 
Miano, D. (2023, May). Understanding interaction forces at silicon wafer interfaces to optimize nanoscale cleaning processes (poster) [Conference Presentation]. 2nd Conference of Applied Surface Technology (COAST 2023), Wien, TU, Austria. http://hdl.handle.net/20.500.12708/176842
-
Publication Type: 
Presentation - Conference Presentation
en
Language: 
English
-
Authors: 
Miano, Daniela 
-
Organisational Unit: 
E134-02 - Forschungsbereich Applied Interface Physics 
-
Date (published): 
May-2023
-
Event name: 
2nd Conference of Applied Surface Technology (COAST 2023) 
en
Event date: 
2-May-2023 - 3-May-2023
-
Event place: 
Wien, TU, Austria
-
Keywords: 
Angewandte Grenzflächenphysik
de
Link (external): 
coast.cest.at
-
Research Areas: 
Materials Characterization: 50%
Surfaces and Interfaces: 50%
-
Science Branch: 
1030 - Physik, Astronomie: 100%
-
Appears in Collections:
Presentation

Show full item record

Page view(s)

100
checked on Dec 1, 2023

Download(s)

1
checked on Dec 1, 2023

Google ScholarTM

Check