Record link: 
http://hdl.handle.net/20.500.12708/176842
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Title: 
Understanding interaction forces at silicon wafer interfaces to optimize nanoscale cleaning processes (poster)
en
Citation: 
Miano, D. (2023, May). Understanding interaction forces at silicon wafer interfaces to optimize nanoscale cleaning processes (poster) [Conference Presentation]. 2nd Conference of Applied Surface Technology (COAST 2023), Wien, TU, Austria. http://hdl.handle.net/20.500.12708/176842
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Publication Type: 
Presentation - Conference Presentation
en
Language: 
English
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Authors: 
Miano, Daniela 
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Organisational Unit: 
E134-02 - Forschungsbereich Applied Interface Physics 
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Date (published): 
May-2023
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Event name: 
2nd Conference of Applied Surface Technology (COAST 2023) 
en
Event date: 
2-May-2023 - 3-May-2023
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Event place: 
Wien, TU, Austria
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Keywords: 
Angewandte Grenzflächenphysik
de
Link (external): 
coast.cest.at
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Research Areas: 
Materials Characterization: 50%
Surfaces and Interfaces: 50%
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Science Branch: 
1030 - Physik, Astronomie: 100%
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