<div class="csl-bib-body">
<div class="csl-entry">Ignat, I., Arvidsson, E., Roos, A., Scarano, E., Haviland, D. B., Platz, D., & Schmid, U. (2023). Vacuum gap electromechanical devices with integrated piezoelectric actuator. In <i>FNS 2023 : Frontiers of Nanomechanical Systems : Book of Abstracts</i> (pp. 106–106). http://hdl.handle.net/20.500.12708/192876</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/192876
-
dc.language.iso
en
-
dc.subject
Vacuum Gap
en
dc.subject
electromechnical device
en
dc.subject
integrated piezoelectric actuator
en
dc.title
Vacuum gap electromechanical devices with integrated piezoelectric actuator
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
TU Wien, Österreich
-
dc.contributor.affiliation
KTH Royal Institute of Technology, Sweden
-
dc.contributor.affiliation
KTH Royal Institute of Technology, Sweden
-
dc.contributor.affiliation
KTH Royal Institute of Technology, Sweden
-
dc.contributor.affiliation
KTH Royal Institute of Technology, Sweden
-
dc.description.startpage
106
-
dc.description.endpage
106
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
FNS 2023 : Frontiers of Nanomechanical Systems : Book of Abstracts
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.publication.orgunit
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
dc.description.numberOfPages
1
-
tuw.author.orcid
0000-0001-7469-9975
-
tuw.author.orcid
0000-0003-2552-6415
-
tuw.author.orcid
0000-0001-8534-6577
-
tuw.author.orcid
0000-0002-5923-0279
-
tuw.event.name
FNS 2023 : Frontiers of Nanomechanical Systems
en
tuw.event.startdate
06-06-2023
-
tuw.event.enddate
09-06-2023
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Delft
-
tuw.event.country
NL
-
tuw.event.presenter
Ignat, Ioan
-
tuw.event.track
Multi Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference paper
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item.grantfulltext
restricted
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item.fulltext
no Fulltext
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item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
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crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
KTH Royal Institute of Technology
-
crisitem.author.dept
KTH Royal Institute of Technology
-
crisitem.author.dept
KTH Royal Institute of Technology
-
crisitem.author.dept
KTH Royal Institute of Technology
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.orcid
0000-0001-7469-9975
-
crisitem.author.orcid
0000-0003-2552-6415
-
crisitem.author.orcid
0000-0001-8534-6577
-
crisitem.author.orcid
0000-0002-5923-0279
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
