Record link: 
http://hdl.handle.net/20.500.12708/192876
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Title: 
Vacuum gap electromechanical devices with integrated piezoelectric actuator
en
Citation: 
Ignat, I., Arvidsson, E., Roos, A., Scarano, E., Haviland, D. B., Platz, D., & Schmid, U. (2023). Vacuum gap electromechanical devices with integrated piezoelectric actuator. In FNS 2023 : Frontiers of Nanomechanical Systems : Book of Abstracts (pp. 106–106).
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Publication Type: 
Inproceedings - Abstract Book Contribution
en
Language: 
English
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Authors: 
Ignat, Ioan 
Arvidsson, Elisabet 
Roos, August 
Scarano, Ermes 
Haviland, David B 
Platz, Daniel 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
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Published in: 
FNS 2023 : Frontiers of Nanomechanical Systems : Book of Abstracts 
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Date (published): 
Jun-2023
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Event name: 
FNS 2023 : Frontiers of Nanomechanical Systems 
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Event date: 
6-Jun-2023 - 9-Jun-2023
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Event place: 
Delft, Netherlands (the)
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Number of Pages: 
1
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Keywords: 
Vacuum Gap; electromechnical device; integrated piezoelectric actuator
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Research Areas: 
Modeling and Simulation: 50%
Sensor Systems: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
Conference Paper

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