<div class="csl-bib-body">
<div class="csl-entry">Platz, D., Stixenberger, M., Loch Gesing, A., Ignat, I., Kähler, H., & Schmid, U. (2023). Quality Factor Modulation in MEMS Resonators by Elastic Wave Interference in the Anchor Region. In <i>Transducers 2023 : The 22nd International Conference on Solid-State Electronics, Actuators and Microsystems</i> (pp. 1762–1765). IEEJ.</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/193978
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dc.description.abstract
Anchor losses are one of the dominant dissipation mechanisms for MEMS resonators in vacuum. For slender
beam resonators, the underlying mechanism is modeled by approximating the anchor region as a single point source of
elastic waves. Here, we discuss that this approximation is not valid for plate resonators where the anchor region
effectively becomes a line distribution of point sources. We use finite element simulations to show that the flux of
mechanical energy in the substrate strongly depends on the mode in which the resonators vibrates. We utilize this
effect to modulate the anchor loss quality factor in simulations and experiments over two orders of magnitude
by changing the resonator’s width.
en
dc.language.iso
en
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dc.subject
MEMS
en
dc.subject
resonators
en
dc.subject
anchor losses
en
dc.subject
elastic waves
en
dc.subject
interference
en
dc.title
Quality Factor Modulation in MEMS Resonators by Elastic Wave Interference in the Anchor Region
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.relation.isbn
978-4-88686-435-2
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dc.description.startpage
1762
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dc.description.endpage
1765
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dc.type.category
Full-Paper Contribution
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tuw.booktitle
Transducers 2023 : The 22nd International Conference on Solid-State Electronics, Actuators and Microsystems
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tuw.relation.publisher
IEEJ
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tuw.researchTopic.id
C6
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Modeling and Simulation
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tuw.researchTopic.name
Sensor Systems
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tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
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tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publication.orgunit
E366-01 - Forschungsbereich Mikro- und Nanosensorik
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dc.description.numberOfPages
4
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tuw.author.orcid
0000-0002-5923-0279
-
tuw.event.name
Transducers 2023 : The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems
en
tuw.event.startdate
25-06-2023
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tuw.event.enddate
29-06-2023
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Kyoto
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tuw.event.country
JP
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tuw.event.presenter
Platz, Daniel
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tuw.event.track
Multi Track
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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item.openairecristype
http://purl.org/coar/resource_type/c_5794
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item.fulltext
no Fulltext
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item.openairetype
conference paper
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item.cerifentitytype
Publications
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item.grantfulltext
restricted
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item.languageiso639-1
en
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crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
TU Wien
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.orcid
0000-0002-5923-0279
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik