Platz, D., Stixenberger, M., Loch Gesing, A., Ignat, I., Kähler, H., & Schmid, U. (2023). Quality Factor Modulation in MEMS Resonators by Elastic Wave Interference in the Anchor Region. In Transducers 2023 : The 22nd International Conference on Solid-State Electronics, Actuators and Microsystems (pp. 1762–1765). IEEJ.