Thermoelectric materials have gained much attention in recent years due to their ability to directly interconvert electrical and thermal energy via the Seebeck/Peltier effect. This can be used to convert waste heat back into usable electrical energy, making thermoelectrics very interesting materials in a world with increasing demand for renewable and efficient utilisation of energy. The efficiency of this process is generally dependent on three parameters - the thermopower S, the electrical conductivity σ and the thermal conductivity λ - which are represented together in the dimensionless Figure of Merit ZT. Among thermoelectrics, Heusler and half-Heusler materials have shown to be promising candidates, due to their high Seebeck coefficients at room temperature and their high electrical conductivity, while generally higher thermal conductivity is often a drawback in thermoelectric performance. In 2019, Hinterleitner et al. managed to produce magnetron sputtered thin films of bcc-Fe2V0.8W0.2Al with an exceptionally high Seebeck coefficient, Power Factor and Figure of Merit, but the samples needed to be heat-treated for one week to crystallize from their initially amorphous state [1]. In this work, we present Fe2VAl-based full-Heusler thin films retaining their crystallinity during sputter deposition. By tuning deposition temperature, bias potential and pulse on-time we managed to fabricate films in a W-type bcc-structure on silicon and austenite substrates. These films were analysed using XRD, EDX, electron microscopy and by measurement of transport data (resistivity, Seebeck coefficient). Thermal conductivity of the films was derived from measurements of thermoreflectance and specific heat capacity.