Introduction Transition metal nitrides are commonly used in hard and protective coating industry, b limited by low intrinsic fracture toughness. Encouraged by the previous study that sup (SLs) could remarkably improve strength and ductility, in this study, some TiN/MoN SL are sputtered on (100) MgO substrates. Methods A total of 12 samples were produced, including TiN/MoN superlattices with 3 bilayer ratios ℓ :ℓ of 1:0.5, 1:2, and 1:2.7, and for each bilayer ratio there are 4 different bi periods (Λ), which are designed to be 3, 6, 9, and 18 nm. However, the real bilayer peri estimated by three ways: 1) dividing the total coating thickness measured by scanning microscopy (SEM) with the total number of bilayers; 2) via the satellite peaks in the X-r diffraction (XRD) patterns; 3) high-resolution and scanning transmission electron micr (HRTEM/STEM). For detailed TEM studies, we used a JEOL 2100F, equipped with an im C –corrector. Results These SLs are with bilayer periods (Λ) of 2–23 nm and a bilayer ratio (ℓ :ℓ ) of 1:1, 1:2, and 1:2.7. This work is aim to explore the influence of bilayer periods and ratios, an vacancies on TiN/MoN superlattice. All SLs – independent of bilayer period, bilayer rat nitrogen content – present a rocksalt structure, with high-order satellite peaks during diffraction. But a weak tetragonal β-Mo N signal is also detected for the SLs with Λ = 7 (ℓ :ℓ = 1:2). The SLs with bilayer ratios of 1:0.5 and 1:2 do not show superlattice e bilayer-period-dependent. The SLs with ℓ :ℓ = 1:2.7 provide highest hardness due nitrogen supply during deposition. Contrary, the SLs with ℓ :ℓ = 1:2 have the wors mechanical properties due to the tetragonal β-Mo N phase exist. Among all SLs invest those with ℓ :ℓ = 1:1 provide the best blend of mechanical properties, such as H = GPa, K = 4.1 ± 0.2 MPa√m, and μ = 0.27, when Λ = 9.9 nm. Conclusion Controlling the heterogeneous microstructures and the intrinsic mechanical properties individual material components (e.g., β-MoN vs. γ-MoN ) is necessary for a pronounc superlattice effect. Overall, the superlattice concept is of great importance to optimise fracture toughness, as well as tribological performance, which is underlined by compa values of the SLs to those of the monolithically prepared films.