Bilayer period and ratio dependent structure and mechanical properties of TiN/MoN superlattices

Abstract

Transition metal nitrides are widely used in the hard materials and protective coatings industry, but are limited by their low fracture toughness. Encouraged by previous studies on remarkable simultaneous improvements in strength and ductility through superlattice (SL) architectures, various TiN/MoN SL thin films were developed on MgO (100) substrates. By varying their bilayer periods (Λ) between 2 and 23 nm with bilayer ratios (Γ = ℓMoN:ℓTiN) of 0.5, 1, 2, and 2.7, their individual effects on structure and mechanical properties can be revealed. All SLs—independent of Λ, Γ, and nitrogen-to-metal (N/Me) ratio (within the analysed variations)—exhibit a rocksalt structure with high-order satellite peaks in X-ray diffraction. While the SLs with Γ = 2 have the lowest hardness (H)—presumably due to their overall lowest N/Me ratio—the SLs with Γ = 2.7 are the hardest with a neat superlattice effect. The SLs with Γ = 1 and 2.7 have a comparable superlattice effect on fracture toughness (KIC), peaking at Λ = 9.9 and 9.3 nm, respectively. Of all the SLs investigated, those with Γ = 1 provide the best blend of mechanical properties and dry sliding coefficient of friction (µ), such as H = 34.8±1.6 GPa, KIC = 4.1±0.2 MPa√m, and µ = 0.27 when Λ = 9.9 nm. Deepening current understanding of superlattice effects in general—particularly the influence of bilayer periods and ratios—in relation to the nitrogen supply and heterogeneous microstructures, our study accelerates the design of nanolayered coatings with desired structure-property combinations.