Bammer, F., & Huemer, F. F. (2024, November 26). 2D Inline R2R-Measurement with a Polarization Camera [Conference Presentation]. 23rd international Coating Symposium, Dormagen, Germany. http://hdl.handle.net/20.500.12708/209024
E311-02-2 - Forschungsgruppe Prozesstechnik E191-02 - Forschungsbereich Embedded Computing Systems
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Date (published):
26-Nov-2024
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Event name:
23rd international Coating Symposium
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Event date:
26-Nov-2024 - 27-Nov-2024
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Event place:
Dormagen, Germany
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Keywords:
R2R-printing
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Ellipsometrie; Echtzeitsystem
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Abstract:
We present for quality control in R2R-production an inline-imaging-ellipsometer based on a polarization camera, The system, without any moving parts, can be used for full quality control of thin layers with thickness up to 500nm on foil-widths up to 2m. Typical problems like foil-vibrations and backside-reflection are solved via a measurement directly on a roll, which yields a stable image of a line along the roll, with a length equal to the full width of the foil. Due to the foil movement a complete 2D-view of the thickness-distribution can be obtained in-line and in-time. The system was tested with different layer materials, e.g. SiO2, P3HT, PEDOT and Al2O3, all on PET-foils.
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Project title:
Dünnfilmmesstechnik auf organischer Photovoltaik: 315665 (European Commission)
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Research Areas:
Photonics: 50% Sustainable Production and Technologies: 25% Efficient Utilisation of Material Resources: 25%