<div class="csl-bib-body">
<div class="csl-entry">Cavalleri, N., West, R. G., Giesriegl, A., Tropper, T. M., & Schmid, S. (2025). <i>Intrinsic Q-factor Enhancement with Chemical and Physical Treatments in Silicon Nitride Resonators</i> [Poster Presentation]. Frontiers of Nanomechanical Systems 2025, Kanagawa, Japan.</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/218107
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dc.language.iso
en
-
dc.subject
Surface Physics
en
dc.subject
Quality factor enhancement
en
dc.subject
chemical treatment
en
dc.subject
Annealing
en
dc.title
Intrinsic Q-factor Enhancement with Chemical and Physical Treatments in Silicon Nitride Resonators
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Poster Presentation
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Surfaces and Interfaces
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
tuw.author.orcid
0000-0003-3778-7137
-
tuw.event.name
Frontiers of Nanomechanical Systems 2025
en
tuw.event.startdate
03-06-2025
-
tuw.event.enddate
06-06-2025
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Kanagawa
-
tuw.event.country
JP
-
tuw.event.institution
NTT
-
tuw.event.presenter
Cavalleri, Nicola
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.openairecristype
http://purl.org/coar/resource_type/c_18co
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.openairetype
conference poster not in proceedings
-
item.grantfulltext
restricted
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
