Record link: 
http://hdl.handle.net/20.500.12708/218107
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Title: 
Intrinsic Q-factor Enhancement with Chemical and Physical Treatments in Silicon Nitride Resonators
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Citation: 
Cavalleri, N., West, R. G., Giesriegl, A., Tropper, T. M., & Schmid, S. (2025). Intrinsic Q-factor Enhancement with Chemical and Physical Treatments in Silicon Nitride Resonators [Poster Presentation]. Frontiers of Nanomechanical Systems 2025, Kanagawa, Japan.
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Publication Type: 
Presentation - Poster Presentation
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Language: 
English
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Authors: 
Cavalleri, Nicola 
West, Robert Grayson 
Giesriegl, Ariane 
Tropper, Thomas Mathias 
Schmid, Silvan 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
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Date (published): 
2025
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Event name: 
Frontiers of Nanomechanical Systems 2025 
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Event date: 
3-Jun-2025 - 6-Jun-2025
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Event place: 
Kanagawa, Japan
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Keywords: 
Surface Physics; Quality factor enhancement; chemical treatment; Annealing
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Research Areas: 
Surfaces and Interfaces: 50%
Sensor Systems: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Appears in Collections:
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