<div class="csl-bib-body">
<div class="csl-entry">Kostal, R., Reiter, T., Manstetten, P., & Filipovic, L. (2025, June 26). <i>Novel Approaches to Objective Function Design for Optimizing Process TCAD Model Parameters</i> [Poster Presentation]. 24th Conference on “Insulating Films on Semiconductors” (INFOS 2025), Granada, Spain.</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/223893
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dc.description.sponsorship
Infineon Technologies Austria AG
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dc.description.sponsorship
Christian Doppler Forschungsgesells
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dc.language.iso
en
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dc.subject
Process Simulation
en
dc.subject
Objective Function
en
dc.subject
Shape Matching
en
dc.subject
Electron Microscopy
en
dc.subject
Optimization
en
dc.title
Novel Approaches to Objective Function Design for Optimizing Process TCAD Model Parameters
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.relation.grantno
6000013979
-
dc.relation.grantno
00000
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dc.type.category
Poster Presentation
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tuw.project.title
Virtuelle Technologieentwicklung - Important Project of Common European Interest Microelectronics/Communication Technologies
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tuw.project.title
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren
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tuw.researchTopic.id
I6
-
tuw.researchTopic.id
Q4
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Digital Transformation in Manufacturing
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tuw.researchTopic.name
Nanoelectronics
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tuw.researchTopic.name
Modeling and Simulation
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tuw.researchTopic.value
20
-
tuw.researchTopic.value
10
-
tuw.researchTopic.value
70
-
tuw.publication.orgunit
E360-01 - Forschungsbereich Mikroelektronik
-
tuw.publication.orgunit
E056-04 - Fachbereich TU-DX: Towards Applications of 2D Materials
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tuw.author.orcid
0000-0002-5638-9129
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tuw.author.orcid
0000-0003-1687-5058
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tuw.event.name
24th Conference on “Insulating Films on Semiconductors” (INFOS 2025)
