Kostal, R., Reiter, T., Manstetten, P., & Filipovic, L. (2025, June 26). Novel Approaches to Objective Function Design for Optimizing Process TCAD Model Parameters [Poster Presentation]. 24th Conference on “Insulating Films on Semiconductors” (INFOS 2025), Granada, Spain.
E360-01 - Forschungsbereich Mikroelektronik E056-04 - Fachbereich TU-DX: Towards Applications of 2D Materials
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Date (published):
26-Jun-2025
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Event name:
24th Conference on “Insulating Films on Semiconductors” (INFOS 2025)
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Event date:
25-Jun-2025 - 27-Jun-2025
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Event place:
Granada, Spain
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Keywords:
Process Simulation; Objective Function; Shape Matching; Electron Microscopy; Optimization
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Project title:
Virtuelle Technologieentwicklung - Important Project of Common European Interest Microelectronics/Communication Technologies: 6000013979 (Infineon Technologies Austria AG) Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren: 00000 (Christian Doppler Forschungsgesells)
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Research Areas:
Digital Transformation in Manufacturing: 20% Nanoelectronics: 10% Modeling and Simulation: 70%
