Record link: 
http://hdl.handle.net/20.500.12708/223893
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Title: 
Novel Approaches to Objective Function Design for Optimizing Process TCAD Model Parameters
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Citation: 
Kostal, R., Reiter, T., Manstetten, P., & Filipovic, L. (2025, June 26). Novel Approaches to Objective Function Design for Optimizing Process TCAD Model Parameters [Poster Presentation]. 24th Conference on “Insulating Films on Semiconductors” (INFOS 2025), Granada, Spain.
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Publication Type: 
Presentation - Poster Presentation
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Language: 
English
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Authors: 
Kostal, Roman 
Reiter, Tobias 
Manstetten, Paul 
Filipovic, Lado 
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Organisational Unit: 
E360-01 - Forschungsbereich Mikroelektronik 
E056-04 - Fachbereich TU-DX: Towards Applications of 2D Materials 
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Date (published): 
26-Jun-2025
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Event name: 
24th Conference on “Insulating Films on Semiconductors” (INFOS 2025) 
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Event date: 
25-Jun-2025 - 27-Jun-2025
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Event place: 
Granada, Spain
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Keywords: 
Process Simulation; Objective Function; Shape Matching; Electron Microscopy; Optimization
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Project title: 
Virtuelle Technologieentwicklung - Important Project of Common European Interest Microelectronics/Communication Technologies: 6000013979 (Infineon Technologies Austria AG) 
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren: 00000 (Christian Doppler Forschungsgesells) 
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Research Areas: 
Digital Transformation in Manufacturing: 20%
Nanoelectronics: 10%
Modeling and Simulation: 70%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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