TiB₂ is known as a superhard material achieving an indentation hardness of over 40 GPa. Coatings of TiB₂ produced by DC magnetron sputtering are typically superstoichiometric regarding the B/Ti-ratio (TiB₂.₄ to TiB₃.₅) with the surplus in boron forming a tissue phase relevant to the material’s properties. Here, we aim to show the change in mechanical properties of TiB₂ when crossing the stoichiometric point through DCMS and HiPIMS by placing pieces of pure Ti along the race track of the target and varying the pulse on-time for HiPIMS. The films are analysed through XRD and SAED for structural information, ICP-OES to determine the B/Ti-ratio as well as SEM and TEM for microstructure. Hardness and Young’s Modulus are measured by nanoindentation while KIC values are determined by cube corner indentation and microcantilever bending. Results show similar behaviour of highly super- and substoichiometric films, with stoichiometric films behaving differently. KIC measured through CC indentation varies greatly throughout, owed to the stress-dependency, while assessments by microcantilever bending show no trends with KIC keeping in a range of 2.5-3.5 MPa√m.