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Record link: 
http://hdl.handle.net/20.500.12708/66216
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Title: 
A Small and Fast SCPEM-Based Ellipsometer
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Citation: 
Bammer, F., Petkovsek, R., Mozina, J., & Petelin, J. (2010). A Small and Fast SCPEM-Based Ellipsometer. In Proceedings of SPIE, Optical Components and Materials VII (pp. 75981T-1-75981T – 8). SPIE-Proceedings. http://hdl.handle.net/20.500.12708/66216
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Publication Type: 
Inproceedings - Poster Contribution
en
Authors: 
Bammer, Ferdinand 
Petkovsek, Rok 
Mozina, Janez 
Petelin, Jaka 
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Organisational Unit: 
E311-02-2 - Forschungsgruppe Prozesstechnik 
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Published in: 
Proceedings of SPIE, Optical Components and Materials VII 
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Date (published): 
2010
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Event name: 
Photonics West 2010 
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Event date: 
26-Jan-2010 - 28-Jan-2010
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Event place: 
San Francisco, USA, Non-EU
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Number of Pages: 
8
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Publisher: 
SPIE-Proceedings, Vol. 7598
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Peer reviewed: 
No
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Keywords: 
LiTaO3; photo-elastic modulators; ellipsometry
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Abstract: 
Ein kleines schnelles Ellipsometer zur Qualitätskontrolle in der Produktion
de
 
We propose a small and fast ellipsometer with a basic layout similar to that of conventional ellipsometers using photo-elastic modulators (PEM) oscillating with 50 kHz. A conventional PEM is rather large, ~10 x 20 x 100mm, since it consists of one piece of glass and an actuator. Both parts are carefully adjusted to the desired frequency and then glued together. We replace such a standard modulator...
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Science Branch: 
Maschinenbau, Instrumentenbau
Sonstige und interdisziplinäre Technische Wissenschaften
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Appears in Collections:
Conference Paper

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