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Record link: 
http://hdl.handle.net/20.500.12708/75460
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Title: 
An Accurate Analytical Squeeze-film Model for Lateral MEMS/MOEMS Oscillators
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Citation: 
Kainz, A. F. H., Kahr, M., Steiner, H., & Keplinger, F. (2016). An Accurate Analytical Squeeze-film Model for Lateral MEMS/MOEMS Oscillators. In Procedia Engineering (pp. 937–940). Procedia Engineering. https://doi.org/10.1016/j.proeng.2016.11.310
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Publisher DOI: 
10.1016/j.proeng.2016.11.310
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Publication Type: 
Inproceedings - Full-Paper Contribution
en
Authors: 
Kainz, Andreas Franz Hubert 
Kahr, Matthias 
Steiner, Harald 
Keplinger, Franz 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
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Published in: 
Procedia Engineering 
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Date (published): 
2016
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Event name: 
30th Eurosensors Conference, EUROSENSORS 2016 
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Event date: 
4-Sep-2016 - 7-Sep-2016
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Event place: 
Budapest, Hungary, Non-EU
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Number of Pages: 
4
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Publisher: 
Procedia Engineering, 168
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Peer reviewed: 
Yes
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Keywords: 
Industrial and Manufacturing Engineering
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Research Areas: 
Special and Engineering Materials: 25%
Structure-Property Relationship: 25%
Sensor Systems: 50%
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Science Branch: 
Elektrotechnik, Elektronik, Informationstechnik
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Appears in Collections:
Conference Paper

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