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Kahr, M., Hortschitz, W., Steiner, H., Stifter, M., Kainz, A., & Keplinger, F. (2018). Novel 3D-Printed MEMS Magnetometer with Optical Detection. In EUROSENSORS 2018. Eurosensors 2018, Graz, Austria. MDPI. https://doi.org/10.3390/proceedings2130783
E366-01 - Forschungsbereich Mikro- und Nanosensorik
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Published in:
EUROSENSORS 2018
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Date (published):
2018
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Event name:
Eurosensors 2018
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Event date:
9-Sep-2018 - 12-Sep-2018
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Event place:
Graz, Austria
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Number of Pages:
5
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Publisher:
MDPI, Vol. 2
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Peer reviewed:
No
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Keywords:
magnetometer; 3D printing; optical readout; Lorentz force
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Abstract:
This paper reports a novel 3D printed MEMS magnetometer with optical readout, which
demonstrates the advantages of 3D printing technology in terms of rapid prototyping. Low-cost and
fast product development cycles favour 3D printing as an effective tool. Sensitivity measurement
with such devices indicate high accuracy and good structural performance, considering material
and technological uncertainties. This paper is focusing on the novelty of the rapid, 3D-printing
prototyping approach and verification of the working principle for printed MEMS magnetometers.
