Design of heterogeneously integrated QCLs on SOI

Abstract

In the current thesis the focus lies on extending the Photonic Integrated Circuits to 7.67um, facilitating Suspended Waveguides and active components by hybrid integration of III-V materials. The passive Suspended Waveguide is a structure defined by a metamaterial sub wavelength grating, defining the lateral cladding. By partially removing the BOX beneath the waveguide the Si wavegudes can operate up to 8um. Quantum Cascade Lasers are the light source of choice as they have proven to be reliable sources in the Mid Infra Red spectrum and work at room temperature. By bonding the III-V wafer containing the Quantum Cascade Laser active region on top of a SuspendedWaveguide, a heterogeneous active waveguide is built. At each end of the heterogeneous active waveguide region couplers connect this region with the Suspended Waveguide. This way amplifier structures and even lasers can be built. The focus in the current thesis lies on the coupler design. Three couplers are designed and simulated in FIMMWAVE.